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Patent families
EP1760319A4
Turbomolecular pump bearing support
— · Leybold/Osaka/Shimadzu/Pfeiffer/Edwards citation graph
EP3400389B1
Coated vacuum-device components / turbomolecular-pump component coating, including NEG layer
2016-06-03 · Pfeiffer Vacuum Components and Solutions GmbH on grant
US12584487B2
Turbomolecular pump rotor/manufacturing architecture; 2026 US publication and grant.
2022-07-07 · Pfeiffer Vacuum SAS
EP4705638A1
Vacuum pump with seals/return-valve/lubricant architecture
2023-05-02 · Pfeiffer Vacuum SAS