PVD, Sputtering & Arc

27 selected family record(s).

Patent families

DE102010031568B4

Arc extinction / pulsed plasma power

— · TRUMPF Hüttinger

DE202010001497U1

HIPIMS source

— · Hauzer

EP2183405A4

DLC on internal surfaces / plasma processing

— · Internal-surface coating graph

JP4730753B2

DLC multilayer coating

— · Kobe Steel

PL2157205T3

High-power pulsed magnetron sputtering / power source

— · Sulzer Metaplas

US11615941B2

Ion-energy / plasma control

— · Advanced Energy

US12503756B2

Industrial inner-surface coating apparatus: elongated plasma source, thermionic target/cathode, gas channel, optional auxiliary anode; hollow article can itself act as hollow cathode during cleaning.

— · Plasmateria GmbH

US20250347003A1

Duplex nanocomposite: PEMS plasma nitriding followed by Ti–Si–C–N nanocomposite coating in the same PVD device.

— · Southwest Research Institute (SwRI)

US6261322B1

Layered DLC/nanocomposite coating

— · DLC ecosystem

US8753725B2

Plasma immersion treatment of hollow substrates

— · Plasma surface-engineering branch

US9175381B2

Double glow discharge surface treatment

— · Plasma surface-engineering branch

WO2008071732A2

RF substrate bias with HIPIMS

— · Oerlikon Balzers

WO2010012293A1

Stable ionization plasma deposition

— · Fraunhofer

CN1412343A

Двойной катод — высокочастотное тлеющее ионное покрытие: оборудование и процесс

2002-03-18 · Taiyuan University of Technology

CN103320772B

Устройство и способ модификации внутренней поверхности металла

2013-07-04 · Dalian University of Technology

CN103952677B

Нанесение покрытия на внутреннюю стенку трубы электронно-усиленным плазменным разрядом

2014-05-12 · Beihang University

EP3400389B1

Coated vacuum-device components / turbomolecular-pump component coating, including NEG layer

2016-06-03 · Pfeiffer Vacuum Components and Solutions GmbH on grant

US12614706B2

Magnetron with controller for monitoring and control

2018-10-22 · Soleras Advanced Coatings BV

US12129549B2

Plasma-enhanced CVD coating system

2022-04-16 · HZO entities

WO2024009229

High-rate magnetron sputtering device

2022-07-06 · Schaeffler Baltic SIA (EP grant)

CN115161589B

In-situ PVD-покрытие после ионного азотирования внутренней стенки трубы

2022-era · —

US20260112591A1

Scanning magnetron PVD apparatus

2023-01-16 · Arrayed Materials (China) Co., Ltd.

WO2024168346A1

PECVD reactors and plasma polymer deposition methods

2023-02-10 · Kayaku Advanced Materials Inc

EP4688921A1

Fluorine-free hydrophobic thin-film coating

2023-03-24 · COTEC GmbH

WO2025124330A1

Magnetron forming method / magnetron sputtering device

2023-12-14 · Beijing NAURA Microelectronics Equipment Co., Ltd.

US12503758B2

Integrated surface preparation/passivation/ALD vacuum architecture

2024-04-03 · Comptek Solutions Oy

WO2026077222A1

Magnetron sputtering cathode/device/apparatus/coating method

2024-10-08 · Suzhou Maxwell Technologies Co., Ltd.