Vacuum Equipment Specification Checklist

Vacuum equipment Specification Acceptance

Equipment scope

System	Key specification points
Vacuum coating unit	process sources, substrate bias, gas control, pumping speed, fixtures, temperature, process logging
Vacuum furnace	hot zone, working temperature, thermal uniformity, leak rate, pumping package, quench system, load capacity
Plasma treatment system	plasma source, pressure range, gas chemistry, bias, temperature control, process uniformity
TVAC / test chamber	volume, pumping, feedthroughs, shrouds, diagnostics, cleanliness, gas load

chamber volume, working dimensions, payload mass and fixture criteria
ultimate pressure, pump-down curve, leak-rate specification and pressure-rise test
gas-flow range, MFC accuracy, gas lines, valves and safety interlocks
power supplies, bias, arc/magnetron/plasma source configuration
temperature range, thermocouple layout, control stability and TUS requirements where relevant
PLC / HMI / data logging, alarm log, recipe control and exported records
spare parts, service access, documentation package and warranty conditions

Record	Why it matters
pump-down test	shows real pumping performance with the delivered chamber
leak / pressure-rise test	separates real leak, virtual leak and outgassing problems
thermal test	validates hot-zone or substrate-temperature control
process demo	confirms source operation, gas control, bias, logging and repeatability
documentation package	drawings, manuals, electrical diagrams, spare parts, PLC backup, calibration certificates