| Criterion | Typical evidence |
|---|
| Vacuum performance | ultimate pressure, pump-down curve, pressure-rise curve, leak-test report |
| Process control | recipe execution, data log, alarm history, MFC and power-supply readbacks |
| Thermal performance | temperature stability, ramp behaviour, TUS record if required |
| Mechanical integration | fixtures, feedthroughs, seals, doors, manipulators and access points |
| Safety | interlocks, overtemperature, cooling flow, gas safety and emergency stop |
| Documentation | manuals, electrical diagrams, pneumatic diagrams, calibration records, spare-parts list |
